DENKEN

ELECTRONICS

FIB circuit correction

We can offer various kind of FIB service such as circuit correction, defect investigation at circuit design, effect confirmation at mask change and fine image confirmation/cross-section observation with second electron, realizing quick TAT, integrated service (decap~FIB~analysis) , higher skill and technology.

Available for wide range of samples such as PKG products, wafer(up to 12-inch), PCB, bear chip etc.

  • Al, Cu(Low-K) wiring process (minimum : 40nm)
  • Integrated multiple processes from decap, pre-processing of removal polyimide, up to resin sealing after processing.
  • Accurate locational processing by using GDS data overlay system
  • PAD make for probes and probe/needle contact are available.
  • The FIB place is completely private room and therefore customers can be there to see what are going on.

※GDS data submission may be required.

FIB circuit correction
MakerSchulumberger/FEIFEI
(Shin Yokohama)(Oita)
Modelp3x-Ⅰp3x-ⅣCentrios
Optical function××
Al wiring etch
Oxide film etch
Cu etch
Polyimide etch
Back-side trench××
Pt depo××
Mo depo (low resistance)××
W depo (low resistance)××
C depo (for cross-section)××
Oxide film depo
WAFER processing8inch××
Cross-section processing/observation××
FIB circuit correction
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