ELECTRONICS
STEM analysis
It is possible to observe ultra thin layer like CMOS oxide products at STEM observation.
Cross-section observation STEM of advanced process products (Low -K oxide film no degeneracy) is available.
| Part number | HD-2700 |
|---|---|
| Maker | Hitachi |
| Acceleration voltage | 80,120,200KV |
| Observation mode | TE,SE,ZC |
| EDX | Oxford×2pcs. |
| Resolution | 0.105nm |
| Sample size | 1×1mm |
| Max magnification | ×8M@200kV |
